JPS6217481Y2 - - Google Patents

Info

Publication number
JPS6217481Y2
JPS6217481Y2 JP2914181U JP2914181U JPS6217481Y2 JP S6217481 Y2 JPS6217481 Y2 JP S6217481Y2 JP 2914181 U JP2914181 U JP 2914181U JP 2914181 U JP2914181 U JP 2914181U JP S6217481 Y2 JPS6217481 Y2 JP S6217481Y2
Authority
JP
Japan
Prior art keywords
susceptor
heating
tube
temperature
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2914181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57142837U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2914181U priority Critical patent/JPS6217481Y2/ja
Publication of JPS57142837U publication Critical patent/JPS57142837U/ja
Application granted granted Critical
Publication of JPS6217481Y2 publication Critical patent/JPS6217481Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2914181U 1981-03-02 1981-03-02 Expired JPS6217481Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2914181U JPS6217481Y2 (en]) 1981-03-02 1981-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2914181U JPS6217481Y2 (en]) 1981-03-02 1981-03-02

Publications (2)

Publication Number Publication Date
JPS57142837U JPS57142837U (en]) 1982-09-07
JPS6217481Y2 true JPS6217481Y2 (en]) 1987-05-06

Family

ID=29826756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2914181U Expired JPS6217481Y2 (en]) 1981-03-02 1981-03-02

Country Status (1)

Country Link
JP (1) JPS6217481Y2 (en])

Also Published As

Publication number Publication date
JPS57142837U (en]) 1982-09-07

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